Silicon Dioxide Deposition Methods Using at Least Ozone and TEOS as Deposition Precursors

ABSTRACT

Embodiments disclosed herein pertain to silicon dioxide deposition methods using at least ozone and tetraethylorthosilicate (TEOS) as deposition precursors. In one embodiment, a silicon dioxide deposition method using at least ozone and TEOS as deposition precursors includes flowing precursors comprising ozone and TEOS to a substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material having an outer surface onto the substrate. The outer surface is treated effective to one of add hydroxyl to or remove hydroxyl from the outer surface in comparison to any hydroxyl presence on the outer surface prior to said treating. After the treating, precursors comprising ozone and TEOS are flowed to the substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material onto the treated outer surface of the substrate. Other embodiments are contemplated.

TECHNICAL FIELD

Embodiments disclosed herein pertain to silicon dioxide depositionmethods using at least ozone and tetraethylorthosilicate (TEOS) asdeposition precursors.

BACKGROUND

Silicon dioxide is one material commonly used as a dielectric in thefabrication of integrated circuitry. Such can be deposited in a numberof different manners. One technique includes thermal chemical vapordeposition using precursor gases comprising ozone and TEOS. Such mightbe conducted under pressure conditions which are atmospheric,subatmospheric, or greater than atmospheric pressure. Silicon dioxidedeposited utilizing TEOS and ozone might deposit at uniform rate andthickness over a substrate, or selectively over different areas of thesubstrate depending upon underlying different materials over which suchare deposited, and which might differ in one or more of composition ordensity.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic sectional view of a portion of a substrate inprocess in accordance with an embodiment of the invention.

FIG. 2 is a view of the FIG. 1 substrate subsequent to that shown byFIG. 1.

FIG. 3 is a view of the FIG. 1 substrate subsequent to that shown byFIG. 2.

FIG. 4 is a view of the FIG. 1 substrate subsequent to that shown byFIG. 3.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

Embodiments of the invention include silicon dioxide deposition methodsusing at least ozone and TEOS as deposition precursors. Some exampleembodiments are described with reference to FIGS. 1-4. In FIG. 1, asubstrate is indicated generally with reference 10, and might comprise asemiconductor substrate. In the context of this document, the term“semiconductor substrate” or “semiconductive substrate” is defined tomean any construction comprising semiconductive material, including, butnot limited to, bulk semiconductive materials such as a semiconductivewafer (either alone or in assemblies comprising other materialsthereon), and semiconductive material layers (either alone or inassemblies comprising other materials). The term “substrate” refers toany supporting structure, including, but not limited to, thesemiconductive substrates described above. Substrate 10 of FIG. 1 isdiagrammatic only, and is depicted as comprising two different materials12 and 14 over which silicon dioxide-comprising material will bedeposited. Some embodiments do not require two different materials, andaccordingly at least an outermost portion of substrate 10 might beencompassed by a single material. Materials 12 and 14 might differ inone or both of composition or density, by way of example. In oneembodiment, one of the at least two different materials 12, 14 comprisesat least one of silicon (i.e., doped or undoped monocrystalline orpolycrystalline silicon), such silicon covered with a native oxide of nogreater than 15 Angstroms thick, or silicon dioxide which is at least 20Angstroms thick (i.e., a thermally grown silicon dioxide layer/region).Another of the at least two different materials 12 and 14 in oneembodiment comprises silicon nitride.

Referring to FIG. 2, precursors comprising ozone and TEOS have beenflowed to substrate 10 under conditions effective to deposit a silicondioxide-comprising material 16 having an outer surface 17 onto substrate10. In one embodiment, the conditions comprise subatmospheric pressureconditions. By way of example only, such deposit can occur bypositioning substrate 10 within any suitable deposition chamber. In oneembodiment, example conditions include from about 250° C. to about 650°C., with example pressure conditions being from about 5 Torr to about600 Torr. Further by way of example only, TEOS can be provided to thesubstrate by a vaporizer held at 150° C. and mixing such with an inerthelium carrier gas flow to establish a flow rate of TEOS and helium tothe substrate at a rate of 200 milligrams per minute. Further by way ofexample only, ozone can be provided to the substrate from any suitableozonator system, for example flowing O₂ and N₂ through an ozonator toyield an ozone stream of 12.8% atomic. Such flowing streams can becombined in a showerhead within the chamber or otherwise provided incombination or separately to a substrate, and are provided by way ofexample only. Regardless, O₂ may also of course flow to the substratealong with O₃. Further by way of example only (i.e., in a chambercapable of processing 300 mm substrates), combined O₃ and O₂ flow (about12% to about 18% by weight O₃) may be at about 6,500 sccm to about 8,000sccm, and TEOS flow may be at about 200 mg/min to about 1,500 mg/min(provided by He carrier flow of from about 6,500 sccm to about 10,000sccm).

Silicon dioxide-comprising material 16 might comprise, consistessentially of, or consist of silicon dioxide. Regardless, such mightdeposit in an essentially non-selective manner over different materials12 and 14 (as shown in FIG. 2), or might deposit in a selective mannerover different materials 12 and 14 (not shown in FIG. 2). In the contextof this document, “selective” means deposition of a stated material to agreater thickness over one material versus another material. Regardless,continuing deposition of silicon dioxide-comprising material 16 may ormay not result in no selectivity in the deposit, selectivity in thedeposit, or a change in degree of selectivity if selectivity in thedeposit occurs at some point during the deposition of silicondioxide-comprising material 16.

Referring to FIG. 3, outer surface 17 is treated, which by way ofexample only in FIG. 3 is depicted with the downwardly directed arrowspointing toward surface 17. After the treating, as will be described inmore detail below, precursors comprising ozone and TEOS are flowed tothe substrate under conditions effective to deposit silicondioxide-comprising material onto the treated outer surface of thesubstrate. Such subsequently deposited silicon dioxide-comprisingmaterial might be the same as or different in composition from silicondioxide-comprising material 16. Further, the flowing precursors and theconditions before and after the treating might be the same, oralternately at least one of the flowing precursors and the conditionsbefore and after the treating might be different. Accordingly by way ofexample only, temperature, pressure, precursor composition, and/or flowrates, etc. might be the same or different before and after thetreating.

Regardless, in but one embodiment, the treating is effective to modifyselectivity in the deposit of the silicon dioxide-comprising materialafter such treating relative to at least two different materials on thesubstrate than would otherwise occur under identical silicondioxide-comprising material deposit conditions in the absence of suchtreating. In one embodiment, a theory by which such might occur iseffectively carried out by acts upon outer surface 17. In otherembodiments, treating occurs and is claimed independent of a specificact occurring relative to outer surface 17 as long as such results in aclaimed effect independent of how such effect is achieved. Nevertheless,in further still other embodiments in the context of silicon dioxidedeposition methods using at least ozone and TEOS as depositionprecursors, certain materials are flowed to the substrate entirelyindependent of whether any effective “treating” occurs or independent ofany resultant effect from such flowing or change in selectivity insilicon dioxide-comprising material deposit, as is clarified below.

In one embodiment, degree of hydroxyl (OH) presence at surface 17 mayimpact modification in selectivity as identified above. In oneembodiment, treating of outer surface 17 is effective to one of addhydroxyl to or remove hydroxyl from outer surface 17 in comparison toany hydroxyl presence on outer surface 17 prior to such treating.Further and accordingly, hydroxyl may or may not be present prior totreating. Further and regardless in one embodiment, outer surface 17might be treated effective to one of add hydroxyl to or remove hydroxylfrom the outer surface in comparison to any hydroxyl presence on theouter surface prior to said treating independent of whether selectivitymodification occurs in a subsequent deposit of silicondioxide-comprising material over different materials 12 and 14 usingozone and TEOS.

By way of example, one embodiment of adding hydroxyl to outer surface 17by such treating comprises exposing the outer surface to H₂O vapor. Suchmight occur by flowing steam to the substrate, or for example by merelyexposing surface 17 to air. For example and by way of example only, suchexposure to air might be by ceasing flow of ozone and TEOS depositionprecursors, and exposing surface 17 to air for some period of time, forexample for at least five minutes, at least one hour, at least 24 hours,or perhaps for days. By way of example only, air exposure may be at roomambient at from 65° F. to 85° F., relative humidity from 30% to 50%, andambient pressure from 0.9 atm to 1.1 atm. A steam exposure example mightinclude a carrier gas flowed through a bubbler at a temperature of from25° C. to 40° C., and substrate pressure at from 5 Torr to 600 Torr forfrom one to three minutes. Further by way of example only, the statedtreating might occur within a chamber by flowing H₂ and O₂ to thechamber.

In one embodiment, outer surface 17 comprises hydroxyl prior to thetreating, and the treating removes hydroxyl from such outer surface. Insuch instance, example treating comprises exposure to at least one ofO₂, O₃, H₂, N₂, hexachlorodisilazane [NH(SiCl₃)₂], He, or Ar, includingany mixtures thereof. Further by way of example only, such treating maybe by exposure to O₂ and/or O₂ plasma at 350° C. to 500° C. at from 5Torr to 600 Torr for from one to three minutes. Similar conditions mightbe utilized with respect to ozone alone or in combination with O₂ andany one or combination of H₂, N₂, hexachlorodisilazane, He, or Ar.

The treating might be conducted during/while flowing the precursorswhich form outer surface 17, or might comprise stopping flowing of suchprecursors which form outer surface 17 prior to conducting the treating.

The flowing of precursors comprising ozone and TEOS to produce material16 comprising outer surface 17 would of course be conducted for someperiod of time prior to conducting the treating. For example, suchflowing of precursors which forms outer surface 17 might be conductedfor at least 200 seconds prior to such treating, and in otherembodiments for at least 300 seconds, or for at least 400 seconds priorto the treating. Independent of time, or alternately considered,conducting the flowing of precursors which form silicondioxide-comprising material having outer surface 17 might be conductedto form material 16 to be at least 250 Angstroms thick prior to suchtreating, alternately at least 300 Angstroms thick, or at least 400Angstroms thick prior to such treating. Again, selectivity in thedeposit of material 16 over substrate 10 may result in such depositionover materials 12 and 14 (not shown), or may result in a substantiallyuniform blanket deposition thickness thereover as is shown. By way ofexample only, one example deposition which produces essentially noselectivity in an ozone TEOS deposition over any of silicon, siliconhaving a native oxide of 10 Angstroms thereover, silicon nitride, andthermally grown oxide of varying thickness includes use of an AppliedMaterials Producer Reactor providing a substrate temperature of 440° C.and an internal chamber pressure of 600 Torr during deposition. A streamcomprising 12.8% O₃ was generated by flowing O₂ and N₂ (0.05%) throughan ozonator system to yield a total flow of 17,000 sccm. TEOS wasdelivered into the chamber through a liquid delivery system by injectingTEOS into a vaporizer held at 150° C. and mixing it with a He carriergas to establish a flow rate of 200 milligrams per minute. The linetemperature leading to the reactor was held constant at 110° C. Suchresulted in essentially no selectivity for at least about 300 seconds,which produced a layer 16 of a thickness of about 250 Angstroms.

Referring to FIG. 4, and after the treating of FIG. 3, precursorscomprising ozone and TEOS have been flowed to substrate 10 underconditions, in one embodiment under subatmospheric pressure conditions,effective to deposit silicon dioxide-comprising material 20 onto treatedouter surface 17 of substrate 10. Again, the flowing precursors and theconditions before and after the treating might be the same, or at leastone of the flowing precursors and the conditions before and after thetreating might be different. Further, silicon dioxide-comprisingmaterial 20 might be the same or different in one of composition ordensity as material 16, and might be of greater or lesser thickness thanmaterial 16. Further where different composition materials 12 and 14 areutilized, silicon dioxide-comprising material 20 might deposit oversurface 17 in some embodiments in a non-selective manner (not shown) orin a selective manner relative to one of materials 12 and 14, with FIG.4 by way of example only depicting greater deposition thickness ofmaterial 20 over material 14 than over material 12. Further in oneembodiment, the treating is effective to modify selectivity in thedeposit of silicon dioxide-comprising material 20 after the treatingrelative to at least two different materials 12 and 14 on substrate 10than would otherwise occur under identical silicon dioxide-comprisingmaterial 20 deposit conditions in the absence of such treating.Accordingly, the treating in at least two example embodiments mightincrease or decrease the selectivity of silicon dioxide-comprisingmaterial 20 deposit over materials 12 and 14 in comparison toselectivity that would occur in the absence of such treating.

In one embodiment, the treating adds hydroxyl to outer surface 17, andmore silicon dioxide-comprising material after such treating depositsover at least one of silicon, silicon covered with a native oxide nogreater than 15 Angstroms thick, or silicon dioxide at least 20Angstroms thick than deposits over silicon nitride than would otherwiseoccur under identical silicon dioxide-comprising material depositconditions in the absence of such treating. In an alternate embodiment,the treating removes hydroxyl from the outer surface, and more silicondioxide-comprising material after such treating deposits over thesilicon nitride than deposits over any of silicon, silicon covered witha native oxide no greater than 15 Angstroms thick, or silicon dioxide atleast 20 Angstroms thick than would otherwise occur under identicalsilicon dioxide-comprising material deposit conditions in the absence ofsuch treating.

Additional embodiments are contemplated which may or may not achievesome or any of the above-stated results. In one embodiment, a silicondioxide deposition method using at least ozone and TEOS as depositionprecursors includes, for a first period of time, flowing precursorscomprising ozone and TEOS to a substrate under conditions effective todeposit silicon dioxide-comprising material onto the substrate. Afterthe first period of time, at least one of H₂, N₂, hexachlorodisilazane,He, or Ar, including any mixtures thereof, is flowed to the substratealong with flowing ozone and TEOS to the substrate for a second periodof time. After such second period of time, precursors comprising ozoneand TEOS are flowed to the substrate under conditions effective todeposit silicon dioxide-comprising material onto the substrate. Theflowing precursors and the conditions before and after the second periodof time might be the same or different, and the silicondioxide-comprising material formed after the second period of time mightbe the same or different, as that formed during the first period oftime. Further and by way of example only, the first period of time mightbe any of at least about 200 seconds, at least about 300 seconds, or atleast about 400 seconds. Further by way of example only, the secondperiod of time might be at least 60 seconds, and perhaps no more than300 seconds.

In one embodiment, a silicon dioxide deposition method using at leastozone and TEOS as deposition precursors includes, for a first period oftime, flowing precursors comprising O₂, O₃, and TEOS to a substrateunder conditions effective to deposit silicon dioxide-comprisingmaterial onto the substrate. The substrate comprises two differentmaterials over which said silicon dioxide-comprising material isdeposited during such first period of time. After the first period oftime, relative flow of at least one of O₂ or O₃ compared to TEOS flow tothe substrate is increased for a second period of time. After suchsecond period of time, precursors comprising O₂, O₃, and TEOS are flowedto the substrate under conditions effective to deposit silicondioxide-comprising material onto the substrate. The increasing ofrelative flow of at least one of O₂ or O₃ compared to TEOS flow to thesubstrate for the second period of time is effective to modifyselectivity in the deposit of the silicon dioxide-comprising materialafter said second period of time relative to the two different materialson the substrate than would otherwise occur under identical silicondioxide-comprising material deposit conditions in the absence of suchtreating. Other processing attributes and results as described above mayor may not be utilized or occur. Regardless, the increasing mightcomprise, in one embodiment, adding flow of at least O₂ or O₃ to thesubstrate, and independent of whether flow of TEOS remains constantduring the first and second time periods. In one embodiment, theincreasing comprises decreasing flow of TEOS to the substrate, andindependent of whether flow of O₂ and O₃ remains constant during thefirst and second periods of time. In one embodiment, the increasingcomprises adding flow of at least one of O₂ or O₃ to the substrate anddecreasing flow of TEOS to the substrate.

In one embodiment, a silicon dioxide deposition method using at leastozone and TEOS as deposition precursors includes, for a first period oftime, flowing precursors comprising O₂, O₃, and TEOS to a substrateunder conditions effective to deposit silicon dioxide-comprisingmaterial onto the substrate. After the first period of time, TEOS flowto the substrate is stopped while continuing to flow O₂ and O₃ to thesubstrate for a second period of time. After such second period of time,precursors comprising O₂, O₃, and TEOS are flowed to the substrate underconditions effective to deposit silicon dioxide-comprising material ontothe substrate. Any of the above stated attributes or results may beemployed or result. Further by way of example only, flow of O₂ and O₃might remain constant or vary during the first and second periods oftime.

In one embodiment, a silicon dioxide deposition method using at leastozone and TEOS as deposition precursors includes, for a first period oftime, flowing precursors comprising ozone and TEOS to a substrate underconditions effective to deposit silicon dioxide-comprising materialhaving an outer surface onto the substrate. After the first period oftime, the deposit of such silicon dioxide-comprising material isstopped. After stopping such deposit of silicon dioxide-comprisingmaterial, at least of one O₂, O₃, H₂, N₂, hexachlorodisilazane, He, orAr, including any mixtures thereof, are flowed to the substrate.Thereafter, precursors comprising ozone and TEOS are flowed to thesubstrate under conditions effective to deposit silicondioxide-comprising material over the outer surface of the substrate. Anyof the above-described techniques or results may or may not occur.

Additional embodiments of the invention contemplate one or moreadditional treatings, flowings, increasings, and/or stoppings withadditional depositing of silicon dioxide-comprising material. Forexample in one embodiment, the flowing precursors comprising ozone andTEOS after the treating forms the silicon dioxide-comprising material tocomprise another outer surface. The another outer surface is treatedeffective to one of add hydroxyl to or remove hydroxyl from the anotherouter surface in comparison to any hydroxyl presence on the anotherouter surface prior to said treating. After the treating of the anotherouter surface, precursors comprising ozone and TEOS are flowed to thesubstrate under subatmospheric pressure conditions effective to depositsilicon dioxide-comprising material onto the treated another outersurface of the substrate. Any attribute as described above with respectto all of the example described embodiments might be utilized. In oneembodiment, the treating of the another outer surface is the same as thefirst stated treating of the first stated outer surface. In oneembodiment, the treating of the another outer surface is different fromthe first stated treating of the first stated outer surface (i.e., intreatment material and/or conditions). In one embodiment, the treatingthe another outer surface adds hydroxyl to the another outer surface. Inone embodiment, the another outer surface comprises hydroxyl prior tothe treating thereof, and the treating the another outer surface removeshydroxyl from the another outer surface. Further and regardless, thesilicon dioxide-comprising material deposited after treating the anotherouter surface might be the same or different from that deposited afterthe first stated treating.

In one embodiment wherein at least one of H₂, N₂, hexachlorodisilazane,He, or Ar is flowed for the second period of time and precursorscomprising ozone and TEOS are flowed thereafter, at least one of H₂, N₂,hexachlorodisilazane, He, or Ar, including any mixtures thereof, isthereafter flowed to the substrate along with flowing ozone and TEOS tothe substrate for a third period of time. After the third period oftime, precursors comprising ozone and TEOS are flowed to the substrateunder conditions effective to deposit silicon dioxide-comprisingmaterial onto the substrate. The stated flowing during the third periodof time may be the same as or different from in at least one ofcomposition and conditions as the stated flowing during the secondperiod of time. Further, the flowing of precursors comprising ozone andTEOS after the third period of time might be the same as or differentfrom in at least one of composition and conditions as the stated flowingof precursors comprising ozone and TEOS after the second period of time,and regardless the silicon dioxide-comprising material deposited therebymight be the same or different.

In one embodiment wherein precursors comprising O₂, O₃, and TEOS havebeen flowed to the substrate after the second period of time whereincreasing occurred of relative flow of at least one of O₂ or O₃compared to TEOS flow to the substrate for the second period of time,relative flow of at least one of O₂ or O₃ compared to TEOS flow to thesubstrate is then increased for a third period of time. After the thirdperiod of time, precursors comprising O₂, O₃, and TEOS are flowed to thesubstrate under conditions effective to deposit silicondioxide-comprising material onto the substrate. The increasing relativeflow of at least one of O₂ or O₃ compared to TEOS flow to the substratefor the third period of time is effective to modify selectivity in thedeposit of the silicon dioxide-comprising material after the thirdperiod of time relative to the two different materials on the substratethan would otherwise occur under identical silicon dioxide-comprisingmaterial deposit conditions in the absence of said treating for thethird period of time. The stated increasing during the third period oftime may be the same as or different from the stated increasing duringthe second period of time. Further, the flowing of precursors comprisingO₂, O₃, and TEOS after the third period of time might be the same as ordifferent from in at least one of composition and conditions as thestated flowing of precursors comprising O₂, O₃, and TEOS after thesecond period of time, and regardless the silicon dioxide-comprisingmaterial deposited thereby might be the same or different.

In one embodiment wherein precursors comprising O₂, O₃, and TEOS areflowed after a second period of time that comprised stopping TEOS flowto the substrate while continuing to flow O₂ and O₃ to the substrate forsuch second period of time, TEOS flow is to the substrate is thenstopped while continuing to flow O₂ and O₃ to the substrate for a thirdperiod of time. After the third period of time, precursors comprisingO₂, O₃, and TEOS are flowed to the substrate under conditions effectiveto deposit silicon dioxide-comprising material onto the substrate.Conditions of the stated stopping during the third period of time may bethe same as or different from conditions of the stated stopping duringthe second period of time. Further, the flowing of precursors comprisingO₂, O₃, and TEOS after the third period of time might be the same as ordifferent from in at least one of composition and conditions as thestated flowing of precursors comprising O₂, O₃, and TEOS after thesecond period of time, and regardless the silicon dioxide-comprisingmaterial deposited thereby might be the same or different.

In one embodiment wherein precursors comprising ozone and TEOS areflowed after treating the outer surface, such forms another outersurface which is then treated. After the treating of the another outersurface, precursors comprising ozone and TEOS are flowed to thesubstrate under conditions effective to deposit silicondioxide-comprising material onto the treated another outer surface ofthe substrate. The treating the another outer surface is effective tomodify selectivity in the deposit of the silicon dioxide-comprisingmaterial after said treating the another outer surface relative to atleast two different materials on the substrate than would otherwiseoccur under identical silicon dioxide-comprising material depositconditions in the absence of said treating the another outer surface.Treating of the another outer surface might be the same as or differentfrom the treating of the first stated outer surface. Further andregardless, the silicon dioxide-comprising material deposited aftertreating the another outer surface might be the same or different fromthat deposited after the first stated treating.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

1. A silicon dioxide deposition method using at least ozone and TEOS as deposition precursors, comprising: flowing precursors comprising ozone and TEOS to a substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material having an outer surface onto the substrate; treating the outer surface effective to one of add hydroxyl to or remove hydroxyl from the outer surface in comparison to any hydroxyl presence on the outer surface prior to said treating; and after the treating, flowing precursors comprising ozone and TEOS to the substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material onto the treated outer surface of the substrate.
 2. The method of claim 1 wherein the treating adds hydroxyl to the outer surface.
 3. The method of claim 2 wherein the treating comprises exposing the outer surface to H₂O vapor.
 4. The method of claim 2 wherein the treating occurs within a chamber, the treating comprising flowing H₂ and O₂ to the chamber.
 5. The method of claim 2 wherein the treating comprises exposure of the surface to air.
 6. The method of claim 5 wherein the exposure to air is for at least 5 minutes.
 7. The method of claim 5 wherein the exposure to air is for at least 1 hour.
 8. The method of claim 5 wherein the exposure to air is for at least 24 hours.
 9. The method of claim 1 wherein the outer surface comprises hydroxyl prior to the treating, the treating removing hydroxyl from the outer surface.
 10. The method of claim 9 wherein the treating comprises exposure to at least one of H₂, N₂, hexachlorodisilazane, He, or Ar, including any mixtures thereof.
 11. The method of claim 9 wherein the treating comprises exposure to at least one of O₂ or O₃, including any mixtures thereof.
 12. The method of claim 1 comprising conducting the treating during said flowing precursors which forms said outer surface.
 13. The method of claim 12 wherein the treating adds hydroxyl to the outer surface.
 14. The method of claim 12 wherein the outer surface comprises hydroxyl prior to the treating, the treating removing hydroxyl from the outer surface.
 15. The method of claim 1 comprising stopping said flowing precursors which forms said outer surface prior to said treating.
 16. The method of claim 15 wherein the treating adds hydroxyl to the outer surface.
 17. The method of claim 15 wherein the outer surface comprises hydroxyl prior to the treating, the treating removing hydroxyl from the outer surface.
 18. The method of claim 1 wherein the flowing precursors and the conditions before and after the treating are the same.
 19. The method of claim 1 wherein at least one of the flowing precursors and the conditions before and after the treating are different.
 20. The method of claim 1 wherein the treating is effective to modify selectivity in the deposit of the silicon dioxide-comprising material after said treating relative to at least two different materials on the substrate than would otherwise occur under identical silicon dioxide-comprising material deposit conditions in the absence of said treating.
 21. The method of claim 20 wherein, one of the at least two different materials comprises at least one of silicon, silicon covered with a native oxide no greater than 15 Angstroms thick, or silicon dioxide at least 20 Angstroms thick and another of the at least two different materials comprises silicon nitride; the treating adds hydroxyl to the outer surface; and more silicon dioxide-comprising material after said treating deposits over the at least one of silicon, silicon covered with a native oxide no greater than 15 Angstroms thick, or silicon dioxide at least 20 Angstroms thick than deposits over the silicon nitride than would otherwise occur under identical silicon dioxide-comprising material deposit conditions in the absence of said treating. 22-23. (canceled)
 24. The method of claim 20 wherein, one of the at least two different materials comprises at least one of silicon, silicon covered with a native oxide no greater than 15 Angstroms thick, or silicon dioxide at least 20 Angstroms thick and another of the at least two different materials comprises silicon nitride; the outer surface comprises hydroxyl prior to the treating, the treating removing hydroxyl from the outer surface; and more silicon dioxide-comprising material after said treating deposits over the silicon nitride than deposits over the at least one of silicon, silicon covered with a native oxide no greater than 15 Angstroms thick, or silicon dioxide at least 20 Angstroms thick than would otherwise occur under identical silicon dioxide-comprising material deposit conditions in the absence of said treating. 25-26. (canceled)
 27. The method of claim 1 comprising conducting said flowing precursors which forms said outer surface for at least 200 seconds prior to said treating. 28-29. (canceled)
 30. The method of claim 1 comprising conducting said flowing precursors which forms said silicon dioxide-comprising material having said outer surface to be at least 250 Angstroms thick prior to said treating.
 31. The method of claim 30 comprising conducting said flowing precursors which forms said silicon dioxide-comprising material having said outer surface to be at least 300 Angstroms thick prior to said treating.
 32. The method of claim 31 comprising conducting said flowing precursors which forms said silicon dioxide-comprising material having said outer surface to be at least 400 Angstroms thick prior to said treating.
 33. The method of claim 1 wherein the flowing precursors comprising ozone and TEOS after the treating forms the silicon dioxide-comprising material to comprise another outer surface, and comprising: treating the another outer surface effective to one of add hydroxyl to or remove hydroxyl from the another outer surface in comparison to any hydroxyl presence on the another outer surface prior to said treating; and after the treating of the another outer surface, flowing precursors comprising ozone and TEOS to the substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material onto the treated another outer surface of the substrate.
 34. The method of claim 33 wherein the treating the another outer surface is the same as said treating the outer surface.
 35. The method of claim 33 wherein the treating the another outer surface is different from said treating the outer surface.
 36. The method of claim 33 wherein the treating the another outer surface adds hydroxyl to the outer surface.
 37. The method of claim 33 wherein the another outer surface comprises hydroxyl prior to the treating thereof, the treating of the another outer surface removing hydroxyl from the another outer surface.
 38. A silicon dioxide deposition method using at least ozone and TEOS as deposition precursors, comprising: for a first period of time, flowing precursors comprising ozone and TEOS to a substrate under conditions effective to deposit silicon dioxide-comprising material onto the substrate; after the first period of time, flowing at least one of H₂, N₂, hexachlorodisilazane, He, or Ar, including any mixtures thereof, to the substrate along with flowing ozone and TEOS to the substrate for a second period of time; and after the second period of time, flowing precursors comprising ozone and TEOS to the substrate under conditions effective to deposit silicon dioxide-comprising material onto the substrate. 39-44. (canceled)
 45. A silicon dioxide deposition method using at least ozone and TEOS as deposition precursors, comprising: for a first period of time, flowing precursors comprising O₂, O₃, and TEOS to a substrate under conditions effective to deposit silicon dioxide-comprising material onto the substrate, the substrate comprising two different materials over which said silicon dioxide-comprising material is deposited during said first period of time; after the first period of time, increasing relative flow of at least one of O₂ or O₃ compared to TEOS flow to the substrate for a second period of time; and after the second period of time, flowing precursors comprising O₂, O₃, and TEOS to the substrate under conditions effective to deposit silicon dioxide-comprising material onto the substrate, said increasing relative flow of at least one of O₂ or O₃ compared to TEOS flow to the substrate for the second period of time being effective to modify selectivity in the deposit of the silicon dioxide-comprising material after said second period of time relative to the two different materials on the substrate than would otherwise occur under identical silicon dioxide-comprising material deposit conditions in the absence of said treating. 46-51. (canceled)
 52. A silicon dioxide deposition method using at least ozone and TEOS as deposition precursors, comprising: for a first period of time, flowing precursors comprising O₂, O₃, and TEOS to a substrate under conditions effective to deposit silicon dioxide-comprising material onto the substrate; after the first period of time, stopping TEOS flow to the substrate while continuing to flow O₂ and O₃ to the substrate for a second period of time; and after the second period of time, flowing precursors comprising O₂, O₃, and TEOS to the substrate under conditions effective to deposit silicon dioxide-comprising material onto the substrate. 53-54. (canceled)
 55. A silicon dioxide deposition method using at least ozone and TEOS as deposition precursors, comprising: for a first period of time, flowing precursors comprising ozone and TEOS to a substrate under conditions effective to deposit silicon dioxide-comprising material having an outer surface onto the substrate; after the first period of time, stopping the deposit of silicon dioxide-comprising material; after said stopping, flowing at least one of O₂, O₃, H₂, N₂, hexachlorodisilazane, He, or Ar, including any mixtures thereof, to the substrate; and after flowing the at least one of O₂, O₃, H₂, N₂, hexachlorodisilazane, He, or Ar, including any mixtures thereof, to the substrate, flowing precursors comprising ozone and TEOS to the substrate under conditions effective to deposit silicon dioxide-comprising material over the outer surface of the substrate. 56-62. (canceled)
 63. A silicon dioxide deposition method using at least ozone and TEOS as deposition precursors, comprising: flowing precursors comprising ozone and TEOS to a substrate under conditions effective to deposit silicon dioxide-comprising material having an outer surface onto the substrate; treating the outer surface; and after the treating, flowing precursors comprising ozone and TEOS to the substrate under conditions effective to deposit silicon dioxide-comprising material onto the treated outer surface of the substrate, the treating being effective to modify selectivity in the deposit of the silicon dioxide-comprising material after said treating relative to at least two different materials on the substrate than would otherwise occur under identical silicon dioxide-comprising material deposit conditions in the absence of said treating. 64-71. (canceled) 